TitleProfile estimation for Pt submicron wire on rough Si substrate from experimental data
Publication TypeJournal Article
Year of Publication2012
AuthorsKaramehmedović, M, Hansen, P-E, Dirscherl, K, Karamehmedovic, E, Wriedt, T
Start Page21678

An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.